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need to move or deform elastically in very simple ways Thus, controlled and coordinated movement of mechanical elements is not usually required Even when such movement is required, it is quite simple, such as holding a clamped-clamped beam in different deformed con gurations In micro uidics, uid is moved in a controlled manner through microchannels for which valves and pumps are necessary The mechanical structures in these are also not subject to sophisticated mechanical movement Manipulating light beams is one application in MEMS that requires mechanical transmissions to a limited extent A commercially available MEMS-based projection display system from Texas Instruments uses an array of micromirrors, each of which can be individually tilted between two angles about an axis This is an example of microoptomechanical systems where mechanical movement is quite simple There are some others, optical workbenches for example, where reasonably sophisticated mechanical movements are necessary Many types of actuators use mechanical movements but those are usually quite simple, such as rotation about an axis or sliding along an axis Compliant mechanisms (ie, elastically exible structures) are used widely in MEMS for achieving mechanical movements These are referred over rigid-link jointed mechanisms because of the ease of fabrication as a unitized structure without assembly An example of a compliant mechanism is shown in Fig 153 Several microgrippers are also demonstrated but the extent of mechanical movement in them is also quite limited Micromechanical locks developed by Sandia National Laboratories for weapons-safety systems is a MEMS device that has substantive mechanical complexity Some devices developed for microassembly and manipulation of micron-sized objects also exist In the remainder of this section, generic joints, gears, and some mechanisms are described These serve as ancillary parts to the MEMS devices built using cams Speci c applications involving cams and gears are described in detail in Sec 156 1551 In-Plane Revolute Joints A revolute joint whose axis is perpendicular to the wafer surface is necessary for fabricating micromechanisms with in-plane motion Microfabricating such a joint without.

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FIGURE 153 A laser-micromachined displacement amplifying compliant micromechanism made using an index-card

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assembly was a critical development in the MEMS eld Fan, Tai, and Muller at the University of California Berkeley Sensor and Actuator Center rst accomplished it using a sacri cial layer-based surface micromachining process in 1986 in their efforts to make a rotary electrostatic micromotor A group at the Massachusetts Institute of Technology also accomplished this at the same time using very similar design and processing techniques The schematic of this joint is shown in Fig 154 A oating (as opposed to being xed to the substrate) in-plane joint is also possible The in-plane revolute joints are useful for mounting cams to the substrate or to a moving member 1552 Out-of-Plane Revolute Joints Microfabricating an out-of-plane revolute joint was another important milestone K Pister of Berkeley Sensor and Actuator Center accomplished this by cleverly using a sacri cial layer in the surface micromachining process The schematics of substrate and oating joints are shown in Fig 155 These joints can be used in conjunction with cams to achieve out-of-plane mechanical movement 1553 Linkages A number of micromachined in-plane and out-of-plane linkages consisting of revolute joints and sliders have been demonstrated One practical application used these in conjunction with gears and some cams to create micromechanical locks Another application is integrated optics-on-a-chip wherein light beams can be manipulated and modulated using movable mechanical structures A few speci c linkages and mechanisms are described in Sec 156 1554 Gears Several micromachining processes can be used to make gears and racks in assembled or nonassembled form from the micron scale up to the millimeter scale A proper involute pro le for gear teeth is possible in photolithography masks, and deep etching techniques give reasonably smooth vertical surfaces for teeth This means that cams also can be made easily using micromachining processes However, cams are not yet used in MEMS in the traditional way but alternate manifestations of cams do exist These are discussed in Sec 156.

(b) FIGURE 155 Solid models of out-of-plane surface micromachined substrate and oating revolute joints (a) as fabricated (b) after movement

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